JPS5636149U - - Google Patents
Info
- Publication number
- JPS5636149U JPS5636149U JP11863479U JP11863479U JPS5636149U JP S5636149 U JPS5636149 U JP S5636149U JP 11863479 U JP11863479 U JP 11863479U JP 11863479 U JP11863479 U JP 11863479U JP S5636149 U JPS5636149 U JP S5636149U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11863479U JPS5636149U (en]) | 1979-08-28 | 1979-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11863479U JPS5636149U (en]) | 1979-08-28 | 1979-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5636149U true JPS5636149U (en]) | 1981-04-07 |
Family
ID=29350846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11863479U Pending JPS5636149U (en]) | 1979-08-28 | 1979-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5636149U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851521A (ja) * | 1981-09-24 | 1983-03-26 | Hitachi Ltd | 半導体ウェハのダイシング方法 |
| JPH0259858U (en]) * | 1988-10-20 | 1990-05-01 |
-
1979
- 1979-08-28 JP JP11863479U patent/JPS5636149U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851521A (ja) * | 1981-09-24 | 1983-03-26 | Hitachi Ltd | 半導体ウェハのダイシング方法 |
| JPH0259858U (en]) * | 1988-10-20 | 1990-05-01 |